Details
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Operation
Normally Closed Bellows Seal
Brand
SMC
Seal Material
FKM
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Width mm
Height mm
Ambient Temperature
Application
Actuation
Seal Type
Feature
Operation
List Price
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Available to Order
74
121
48
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Available to Order
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Available to Order
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5 to 60°C
High Vacuum
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Normally Closed Bellows Seal
Available to Order
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
59
108
38
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Normally Closed
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Available to Order
104
171
66
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Available to Order
77
121
48
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Available to Order
110
185
79
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
–
–
Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed Bellows Seal
Available to Order
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Available to Order
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High vacuum applications
Single acting
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Bellows seal
Normally Closed
Available to Order
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Available to Order
98
171
66
–
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Single acting
Bellows Seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Available to Order
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Available to Order
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Available to Order
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Available to Order


