SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//- Buy Price(exc VAT)
tech sheet
Details
Operation
Normally Closed Bellows Seal
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Seal Material
FKM
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Feature
Length mm
Width mm
Height mm
Ambient Temperature
Application
Actuation
Seal Type
Operation
List Price
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Normally Closed Bellows Seal
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74
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48
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5 to 60°C
High Vacuum
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Normally Closed Bellows Seal
Available to Order
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Normally Closed
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59
108
38
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Normally Closed
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104
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77
121
48
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110
185
79
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
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Available to Order
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Available to Order
Bellows seal
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High vacuum applications
Single acting
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Normally Closed
Available to Order
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Available to Order
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
171
66
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Single acting
Bellows Seal
Normally Closed
Available to Order
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Available to Order
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Available to Order
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Available to Order