Details
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Actuation
Normally Closed
Valve Material
Aluminium
Width mm
121
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Height mm
48
Seal Material
FKM
Body Material
Aluminium
Seal Type
Bellows Seal
Series
XL2
Manufacturer
SMC
Length mm
74
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Ambient Temperature
Application
Width mm
Length mm
Height mm
Feature
Actuation
List Price
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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Available to Order
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121
74
48
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Available to Order
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–
–
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Available to Order
Normally Closed Bellows Seal
5 to 60°C
High Vacuum
–
–
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Available to Order
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Available to Order
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Available to Order
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Normally Closed
Available to Order
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108
59
38
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Normally Closed
Available to Order
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–
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171
104
66
–
–
Available to Order
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–
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121
77
48
–
–
Available to Order
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–
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185
110
79
–
–
Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Normally Closed
Available to Order
Normally Closed Bellows Seal
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
Available to Order
Normally Closed
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High vacuum applications
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–
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Bellows seal
Single acting
Available to Order
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–
Available to Order
Normally Closed
–
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171
98
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
Available to Order
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Available to Order
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Available to Order


