SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//- Buy Price(exc VAT)
tech sheet
Details
Operation
Normally Closed, Single Acting, Bellows Seal
Actuator Working Temperature
5 to 60°C
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Seal Material
FKM
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Feature
Length mm
Width mm
Height mm
Ambient Temperature
Application
Actuation
Seal Type
List Price
Normally Closed Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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121
48
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Available to Order
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Available to Order
Normally Closed Bellows Seal
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5 to 60°C
High Vacuum
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Available to Order
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Normally Closed
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Available to Order
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59
108
38
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Normally Closed
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Available to Order
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104
171
66
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Available to Order
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77
121
48
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Available to Order
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110
185
79
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
Available to Order
Normally Closed Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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–
Available to Order
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–
Available to Order
Normally Closed
Bellows seal
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High vacuum applications
Single acting
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Available to Order
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Available to Order
Normally Closed
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
171
66
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Single acting
Bellows Seal
Available to Order
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Available to Order
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Available to Order